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Mass Flow Controllers and Meters for All Clean Gases
Economical Mass Flow Controllers and Meters for All Clean Gases
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FMA3106 Model Options
View all modelsEdit these specs to order a different model. Not all combinations are valid. Options compatible with previous selections will be in bold.
*Highlighted options are not compatible. Please select a different combination.
Flow Range
Wetted Materials
Display
Max Operating Pressure
Process Connection Size:
Category
Media type
Accuracy
Communications Protocol
Output Signal
Max Process Temperature
Process Connection Type:
FMA3100 Series mass flow sensors represent a breakthrough in mass flow sensor technology. State-of-the-art electronics, a compact mechanical design, and mass production tooling concepts are combined into one high- performance, cost effective product. The gas flow sensor is suitable for many OEM applications. A 0 to 5 Vdc linear output is standard.
Using the basic FMA3100 thermal mass flow sensor, the FMA3200 mass flow controllers offer accurate, stable control of gas flows in a compact package. In power-off mode, the flow control valve is closed with a minimal leak rate. This cost-effective controller is ideal for many OEM applications, with a 0 to 5 Vdc linear output and a 0 to 5 Vdc control input.
The FMA3300s combine the features of the FMA3100 with an adjustable 3½ digit LCD digital display meter for viewing flow rate in engineering units (i.e., mL/min or L/min). These compact flowmeters have proved effective in many laboratory applications.
GENERAL SPECIFICATIONS
Output: 0 to 5 Vdc (2500 Ω minimum)
Input Setpoint Voltage(FMA3200 Only): 0 to 5 Vdc
Accuracy: ±1.5% FS*
Repeatability: ±0.5% FS
Response Time: 2 seconds (typical) to within ±2% of actual flow rate from 25 to 100% of full scale
Operating Ambient: 10 to 50°C (50 to 122°F), non-condensing atmosphere
Operating Pressure Range:To 150 psi maximum at 25°C (77°F)
Temperature Coefficient: ±0.2% per °C
Pressure Coefficient: ±0.02% per psi
Leak Integrity: 1x10-4 SCCS, He maximum to outside environments
Input Power:
FMA3100 and FMA3300: 12 to 15 Vdc, 100mA (1.5W)
FMA3200: 12 to 15 Vdc, 250 mA (3.75W)
Connections: 1/8' compression fittings, flow ranges up to 1 L/min; ¼' compression fitting for up to 5 L/min; 3/8' compression fitting for 10 L/min
Wetted Materials: Anodized aluminum, FKM O-rings, 304 and 316 SS, epoxy, acetal compression tube fittings standard
Gases: Most clean, dry gases (e.g., air, nitrogen, carbon dioxide, argon, hydrogen, helium, methane, oxygen)
Filtration: Requires 20-micron filter if gas contains any particulate matter
SPECIFICATIONS (FMA3200 Flow Controllers)
Differential Pressure: 15 to 40 psi
Valve Cycle Life: >1 million cycles; valve is normally closed
Control Range: 10:1
Remote Setpoint Voltage: 0 to 5 Vdc
Weight:
FMA3100: 199 g/0.44 lb (907 g/2.0 lb shipping)
FMA3300: 249 g/0.55 lb(1.1 kg/2.5 lb shipping)
FMA3200: 386 g/0.85 lb(1.4 kg/3 lb shipping)
Size Without Fittings (Approx.):
FMA3100: 47 x 26 x 90mm(1.87 x 1.03 x 3.55')
FMA3300: 47 x 26 x 127mm(1.87 x 1.03 x 5.0')
FMA3200: 81 x 26 x 97mm(3.17 x 1.03 x 3.80')
* Stated accuracy under Specifications valid for the following conditions:
1. Temperature between 18 and 25°C (64 and 77°F)
2. Warm-up time: at least 10 min
3. Power input voltage stable (12V ±0.1V) typical
4. Linearity: Add ±0.5% for ranges up to 500 mL/min, ±1.0% over 500 mL/min
5. Accuracy range: 10 to 100%
6. Line pressure of 1 to 30 psi for FMA3100 and FMA3300, and at factory-specified settings for FMA3200
7. Factory gas (specified) is used
Using the basic FMA3100 thermal mass flow sensor, the FMA3200 mass flow controllers offer accurate, stable control of gas flows in a compact package. In power-off mode, the flow control valve is closed with a minimal leak rate. This cost-effective controller is ideal for many OEM applications, with a 0 to 5 Vdc linear output and a 0 to 5 Vdc control input.
The FMA3300s combine the features of the FMA3100 with an adjustable 3½ digit LCD digital display meter for viewing flow rate in engineering units (i.e., mL/min or L/min). These compact flowmeters have proved effective in many laboratory applications.
GENERAL SPECIFICATIONS
Output: 0 to 5 Vdc (2500 Ω minimum)
Input Setpoint Voltage(FMA3200 Only): 0 to 5 Vdc
Accuracy: ±1.5% FS*
Repeatability: ±0.5% FS
Response Time: 2 seconds (typical) to within ±2% of actual flow rate from 25 to 100% of full scale
Operating Ambient: 10 to 50°C (50 to 122°F), non-condensing atmosphere
Operating Pressure Range:To 150 psi maximum at 25°C (77°F)
Temperature Coefficient: ±0.2% per °C
Pressure Coefficient: ±0.02% per psi
Leak Integrity: 1x10-4 SCCS, He maximum to outside environments
Input Power:
FMA3100 and FMA3300: 12 to 15 Vdc, 100mA (1.5W)
FMA3200: 12 to 15 Vdc, 250 mA (3.75W)
Connections: 1/8' compression fittings, flow ranges up to 1 L/min; ¼' compression fitting for up to 5 L/min; 3/8' compression fitting for 10 L/min
Wetted Materials: Anodized aluminum, FKM O-rings, 304 and 316 SS, epoxy, acetal compression tube fittings standard
Gases: Most clean, dry gases (e.g., air, nitrogen, carbon dioxide, argon, hydrogen, helium, methane, oxygen)
Filtration: Requires 20-micron filter if gas contains any particulate matter
SPECIFICATIONS (FMA3200 Flow Controllers)
Differential Pressure: 15 to 40 psi
Valve Cycle Life: >1 million cycles; valve is normally closed
Control Range: 10:1
Remote Setpoint Voltage: 0 to 5 Vdc
Weight:
FMA3100: 199 g/0.44 lb (907 g/2.0 lb shipping)
FMA3300: 249 g/0.55 lb(1.1 kg/2.5 lb shipping)
FMA3200: 386 g/0.85 lb(1.4 kg/3 lb shipping)
Size Without Fittings (Approx.):
FMA3100: 47 x 26 x 90mm(1.87 x 1.03 x 3.55')
FMA3300: 47 x 26 x 127mm(1.87 x 1.03 x 5.0')
FMA3200: 81 x 26 x 97mm(3.17 x 1.03 x 3.80')
* Stated accuracy under Specifications valid for the following conditions:
1. Temperature between 18 and 25°C (64 and 77°F)
2. Warm-up time: at least 10 min
3. Power input voltage stable (12V ±0.1V) typical
4. Linearity: Add ±0.5% for ranges up to 500 mL/min, ±1.0% over 500 mL/min
5. Accuracy range: 10 to 100%
6. Line pressure of 1 to 30 psi for FMA3100 and FMA3300, and at factory-specified settings for FMA3200
7. Factory gas (specified) is used
Rated 5 out of
5
by
Tester Up from
Great
Just what I needed to keep a tester up and running. Fast shipping.
Date published: 2022-10-20
RoHS 2015/863 - View Certificate
CE Approved
UKCA
Do the FMA3200 series mass flow controllers (with both input and output) on sale anymore? I cannot find it on your website. I need a controller without LCD display. Thank you.
Thank you for your inquiry. The FMA3200 series controller have been discontinued. An alternative controller you could look at is the FMA5400 series. It does not have a display.
Date published: 2019-11-08
Is there a flow meter option that can operate under an external pressure greater than atmospheric conditions?
Thank you for your inquiry. The FMA1700/1800A series mass flow meter will operate with greater than atmospheric pressure.
Date published: 2024-07-25
Looking at FMA3104ST in the range of 20-200 sccm, will trace amounts of ammonia gas harm this?
Thank you for your inquiry! These units are not intended for use wit ammonia and we do not have tested data for the threshold at which damage will occur. If ammonia will be present we suggest using the FMA-1600A-LSS series intended for corrosive gases
Date published: 2022-04-15
Can the FMA3102 control the flowrate of a gas? Or does it just measure the flowrate?
Thank you for your inquiry. The FMA3102 is mass flow meter, meaning it only measures the flow rate of gas.
Date published: 2019-09-04
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